Scanning probe lithography (SPL) represents a rapidly evolving class of nanofabrication techniques that utilise the precision of scanning probe microscopy to directly manipulate material surfaces at ...
2019 marked an important milestone for extreme ultraviolet (EUV) lithography. In that year, the EUV patterning technology was for the first time deployed for the mass production of logic chips of the ...
VELDHOVEN, the Netherlands — Plagued by chronic delays and a change of heart at Intel Corp., the Micrascan V 193-nm lithography system is being discontinued by ASM Lithography, which today said it ...
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