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本文系统介绍面向纳米堆叠（Nanostack）技术的工艺设计套件（PDK），涵盖其核心组成：层堆叠定义、垂直结构设计规则、堆叠器件紧凑模型（如RRAM、纳米片晶体管）及参数化单元（PCells）。重点阐述PDK在对准精度、热预算、应力管理与刻蚀选择性 ...